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Posts Tagged: Integrating Ionization

Integrating Ionization into Fan Filters With Distance Restriction to the Wafer Plane

Posted May 7, 2019 by Page One & filed under Custom Fan Filters Blog, Products.

Using the "Dual Zone" filter for FFU Ionization

Since the ionizer in a front end is located right under the filter and in fact the airflow carries the ions to the wafer plane, it is natural to see the ionizer integratedread more

Tags: fan filter units fan filters ffu Integrating Ionization Ionization

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