Designing Expandable Ionization Capability in FFUs
One of the issues facing an engineer designing a clean, static free environment, like an EFEM, is how to meet a customer specification for discharge time without having the ability to test the outcome before finalizing the design. If one Aerobar/read more
Using the "Dual Zone" filter for FFU Ionization
Since the ionizer in a front end is located right under the filter and in fact the airflow carries the ions to the wafer plane, it is natural to see the ionizer integratedread more
