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Custom Fan Filters Blog

Low Profile HEPA/ULPA/PTFE Fan Filter Units – Available options

As the leader in custom engineered Fan Filters Units (FFUs), we are often presented with the challenge of fitting a FFU in a restricted height area. As the semiconductor equipment market continues to pack more equipment in less space, the challenge of getting clean air to the key zones while staying within the space allotted is increasingly challenging. Read the rest of this entry »

Automatic Pressure Controlled (APC) FFUs

Many versions are available to cover different requirements, and following are the 3 basic groups of APC FFUs. Many more subsets of these 3 basic groups exist. Read the rest of this entry »

FFU and Fan Filter Units

A Fan filter Unit is an excellent way to meet the need when a small amount of HEPA/ULPA filtered clean space is required. A fan filter unit can be a very plain item like an Envirco-MAC 10 or something more specific in size and specification, which are referred to by names such as Custom Fan filter Unit , Engineered Fan filter Unit, or Custom specified Fan filter unit. Read the rest of this entry »

Fan Filter Lighting

Lighting in today’s Semiconductor equipment front ends and on the tool.

When a ULPA filtration system, usually in the form of a FFU, is installed the net effect is that you have
the cleanest environment that can be achieved. However one of the things that also happens as a
side effect of the filter being opaque is that any light that was available is now blocked. The answer to
lighting in the Front end/EFEM has taken any number of shapes, but none that are ideal. Fluorescent
lights needs to be replaced and run the risk of breakage where the gases in the bulb are released into
the hyper clean environment.  LEDs are ideal in terms of being very high quality light while giving long
life, but they are typically located off to the side or on the back wall so the light castes shadows and
often what I have seen as far as packaging of the light itself is not up to snuff as far as what should be in
a ISO class 1 or 2 environment.

(Our Answer and Photo Samples Below)  Read the rest of this entry »